Amat P5000 Cvd Manual Pdf

Applied Materials P5000 CVD & Etch. Related Projects. Tegal 6500 HRe Dual Frequency Etch. Tegal 901ACS & 903ACS RF Diode Etch. Tegal 981ACS RF Diode. AMAT / APPLIED MATERIALS Lot of spare parts. Qty / Part number / Description (13) / 0020-09911 / Carrier etchers, 8' (1) / 0010-09247 / CVD/BW 5000 Gas box (1) / 0040-20561 / Preclean cha. (manual valve) V2 (waste) V3 (nupro valve ) V4 (purge) p1. AMAT P5000 lamp-heated CVD, 200mm. Amount of cleaning gas needed for 25 Wafer Lot (1µm SiO2 depo. SSSco supports AMAT P5000 systems and chambers since 2003, delivering high value upgrades, repairs, parts and services. Parts; Upgrades & Retrofits; Services; Available Equipment; P5000 Parts. /dragon-ball-z-super-for-ppsspp-download.html. SSSco ensures high quality parts and modules are delivered to precisely match customer requirements. CVD is a thermal process because a certain thermal energy is needed to decompose the gas precursors and reassemble them in the material to be deposited. Processing conditions in a CVD should avoid gas-phase reactions (homogenous deposition) and should favor that the deposited layer is assembled in the substrate as a surface process. AMAT ENDURA®. CVD / PVD LID CLEAN OBJECTIVE: TO EFFECTIVELY PM THE AMAT ENDURA® CVD / PVD LID IN A TIMELY MANNER, WHILE IMPROVING TOOL RECOVERY, PARTICLE PERFORMANCE, ELIMINATING THE USE OF H 2O 2, AND REDUCING HAZARDOUS WASTE Vacuum Chamber: Vacuum Chamber Process Residue: Vacuum Chamber Components: Old Procedure: Solvent: AMAT ENDURA® CVD/ PVD.

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Amat P5000 Cvd Manual User

Lot of spare parts

Amat P5000 Cvd Manual

Qty / Part number / Description
(1) / 0010-09247 / CVD/BW 5000 Gas box
(1) / 0020-04277 / Flange insulating taper
(1) / 0040-20561 / Preclean chamber process kit
(13) / 0020-09911 / Carrier etchers, 8'
(1) / 0010-03171 / Screwless, bb, TEOS susceptor, 8'
(1) / 0010-01398 / Susceptor assy, 8'
(1) / 0010-37969 / AXZ Plus heater, 8'
(1) / 0010-09940 / CVD Chamber WSI gax box, 8'
(9) / 0020-31532-B / Universal chamber hing valves, 8'
(1) / 0021-09077-001 / Adapter MCVD/DCS chamber
(1) / 0100-71055 / AKT Communication interface
(1) / 0100-11000 / Analog input board
(3) / 0010-70441 REV E / ENDURA basic motorized lift pvd
(1) / Z0707-0182-4 / Belfab bellow
(1) / 0015-09056 / Belfab products bellows solid
(9) / 3070-01004 / Bellows flex NW50xNW50
(1) / 0200-00744 / Bottom pumbing ring liner solid
(1) / 0040-02726 / BRKT anti-lift 8'
(1) / 0100-70149 / Centura assy robot driver
(1) / 0200-39137B / Ceramic dome DPS+ poly
(1) / 0200-18067 / Ceramic insulator 8' HDPCVD
(1) / 0020-26455 / Clamp ring, 6' SMF
(1) / 0100-70019 / Controller distribution WPS board
(1) / 0020-24804 / Cover ring SST ESC
(1) / - / CVD Plate gas box WB, 8'
(3) / - / CVD Pumping plates TEOS
(2) / 0020-30073 / Cylinder clampings, 8'
(2) / 0040-75531 / Deposition ring PVD clean tungstens
(3) / 0100-09134 / Dio fuse boards
(1) / 0100-09137 / Encoder interface board
(1) / 0010-20768 / ENDURA Magnet
(1) / 0050-14872 / Exhaust manifold
(6) / 0040-70319 / Face plate SACVD water cooled 200MM
(6) / 0035-00021 / Focus ring top middle
(2) / 0020-34446 / Gas boxes DXZ
(6) / 0040-00290 / Gas distribution SST manifolds
(1) / 0045-00013 / Gas tube clamp assembly
(6) / 0020-06844 / Gas tube plugs
(3) / 0040-00186 / Gas tube t manifolds
(2) / 0200-18062 / HDP CVD 14IN Ceramic domes
(1) / - / Heat exchanger AMAT0
(1) / - / Heat exchanger AMAT0
(1) / 0040-39240 / High temperature DXZ heater, 8'
(1) / 0010-16174 / Hinge Assy, ISO Valve TEOS
(1) / 594406-83150 / Indramat ac servo bleeder-tbm 1-1-20-22V
(1) / 0010-00017 / Ion tc/ac control module
(1) / 0200-36544 / Isolator, lid flange, Ti-XZ 200MM
(1) / 0015-09091 / Lamp driver
(1) / 0200-02990 / Liner, ceramic top no grove producer, 8'
(1) / - / Load lock door hing assembly
(1) / 0100-09127 / Loader interconnect board
(10) / 0104-09123 / Lower/center /gas / feed clamp dps2
(1) / 0020-25077 / Lower shield, 8' g-12 ti
(1) / 0100-09223 / MAG Gen interface asp
(1) / 3620-01425 / Mainframe pump iq interface module
(2) / 0010-93007 / Manual lid hoist brackets
(1) / 0190-40017 / MDC valve, Turbo ISO W/STEM
(12) / 1063-11-044 / Micron plate guide, centering, srcmp wxz
(1) / 0190-70103 / Monitor light pen interconnect BD
(2) / 0100-00014 / Opto detectors
(1) / 0021-09008 / P5000 Mark ii etch chamber lid
(1) / 0010-13321 / P5000, 8' Robot limb
(1) / - / P5000 Etch chamber plate lid
(1) / - / P5000 Etch chamber plate lid
(1) / 0020-10518 / Sputtering etcher, 8'
(1) / 0100-00015 / Position encoder buffer
(2) / 0104-10429 / Producer mounting blade nickel
(1) / 0015-09312 / Pully, modified, hrtv
(7) / - / Pumping plates CVD
(1) / 0200-20054 / Quartz insulator
(1) / 0020-00006 / Quartz insulator
(50) / 0020-10888 / Set screw half dog nickel 4-40x5/16
(1) / 0200-09439 / Shadow 4mm 150mm ring
(1) / 0200-35780 / Standoff, Rapid cool QTZ
(3) / 0100-0003 / Stepper cont drivers
(1) / 0100-09283 / Stepper driver interface board
(4) / 1040-03-045 REV A / Swage lock for line DPS fittings
(1) / 0190-76043 / Synergy micro system
(2) / 0100-00008 / TC Gauge PWB
(1) / 0010-09306 / Throttle valve drive
(2) / 0020-06051 / Throttle valve plates
(1) / 0190-21602 / Titanium target
(1) / - / TXZ Chamber kit
(1) / 233-2700-02 / Ceramic insert
(1) / 0040-50344 REV 002 / Top chamber gas box lid 200 mm producer
(1) / 0050-09057 / Tube weldement vent baratron 1/2 VCR
(5) / 0010-30591 / Upper magnet assemblies
(1) / 0020-95262 / VARIAN 9200 implanter electrode AM9200
(1) / 0200-02565 / Producer E QTZ
(1) / 0100-00012 / VME control board
(1) / 0020-9700 / 0020-96904 / Wafer arm
(1) / 0010-07332 / Centura, wafer lift hoop, 12'
(1) / 0100-09123 REVC / Wafer sensor board
(1) / 0010-09632 / Configured chamber
(1) / 0290-70002 / Generator for Centura ETO
(1) / - / Frame for P5000
(1) / - / Etch chamber with turbo controller.